Semiprobe SA-8

1 x SEMIPROBE Model: SA-8
Wafer Size: 8"
Semiautomatic prober, 8".

Chuck stage X-Y movement:
Travel: 205 mm x 205 mm
Speed: 50 mm/sec (max)
Resolution: 0.1 µm
Repeatability: +/-0.5 µm
Accuracy: +/- 3 µm
Plananty: +/- 6 µm over travel range
Nema 17 stepper motor
Optical linear encoder

Chuck stage Z movement:
Z Travel: 12 mm
Resolution: 0.1 µm
Repeatability: +/-1.5 µm

Theta movement:
Travel: +/- 4°
Resolution: 0.29 arc-sees (0.003°)

Chucks:
Vacuum / Mechanical damping
Round / Square
HF, HV/HC
Ambient thermal / Custom
Handle die
Waffle packs
Sawn wafers on frame

Nickel plated steel with concentric vacuum rings
Plananty: 5 µm

Platen: Aluminum with stainless steel top
With removable front wedge

Manipulator placement: 360°
Manipulator fixation: Magnetic

Platen movement:
Platen lift: Fixed / Adjustable
Adjustable: Coarse, 40 mm

Microscope mounting / movement:
Mounting: Boom
Post / Bridge
Movement: Manual

Power: 110/220 V, 50/60 Hz, 20 A
Vacuum: 23 Hg / -0.8 Bar