1 Watkins-Johnson

WJ-1000, APCVD System


REF. 562974-W9
CLASS Used
BRAND Watkins-Johnson
Model WJ-1000, APCVD System
YEAR
QUANTITY 1
LOCATION Seller or Machines location:
AMERICA North (USA-Canada-Mexico)
LAST CHECK 02 Dec. 2014
WJ-1000, APCVD System

MANUFACTURE:
Watkins-Johnson
MODEL/TYPE#:
WJ-1000
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DESCRIPTION:
The WJ-1000 is an efficient and productive APCVD system
well-known by major fabs worldwide.

SPECIFICATIONS:
Capable of 100mm, 125mm, 150mm, and 200mm wafer processing
Process extendibility from 0.5 micron to 0.08 micron
Characterized process models for Atmospheric Pressure processes
SMIF/AGV compatible, complying with SEMI specifications
Process muffle environment designed for process flexibility
Four matched deposition chambers are environmentally c
ontrolled to provide continually repeatable film results
High dopant incorporation in bulk film for best planarization
High throughput due to high deposition rate in bulk film
Low cost of ownership



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