ADE, KLA-Tencor 9700

The system features a high-resolution,
double-sided non-contact measurement array with
a sophisticated silicone sensor that is capable of
measuring a wide range of features,
such as topography, sidewall angles,
and non-contact vias.

Dual color LED beam paths allow for
simultaneous light source measurements,
which provides an even more detailed result.

KLA 9700 UltraGage also features a software suite that
collects, stores, and visualizes data in real time.
It allows for the analysis of all relevant data in
both graph and text forms.
This feature can help users identify current process issues,
confirm process repeatability,
and automate data collection for traceability.

Configurable, advanced metrology algorithms
enable rapid 3D topography measurements,
cutting application time by up to 85%.
Its AutoLayerCount allows users to
adjust point density in order to
save valuable operator time, while its
AutoTilt automatically adjusts the vertical position to
compensate for wafer tilt during scanning.

9700 UltraGage is designed to be resilient and
reliable in challenging conditions,
with a rugged and heavy-duty frame that
is resistant to vibration and shock.