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AMAT AKT 1600 PECVD
Ref :
2628713-9-CP
Condition :
Used
Manufacturer :
AMAT
Model :
AKT 1600 PECVD
Year(s) :
2005
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
• Process: PECVD iN,SiO2, i-a-Si, SiON and N+ a-Si
• SoFware Version: AKT7.3
• System Power RaNng: 208 VAC 3-Phase
• Flat panel size: 320 x 352 mm
• (5) Process chambers:
• Film Capability SiN
• SiO2
• i-a-Si
• SiON
• N+ a-Si (Remote Plasma Clean)
Includes:
• Chillers
• Full set of manuals
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