KLA-Tencor 6220 Surfscan

1x, KLA-Tencor 6220 Surfscan

This tool detects, counts, and sizes defects
Specifications:
Throughput: 150 per hour for 200mm wafers
Accommodates wafer sizes: 100,125,150,200mm
Sensitivity: 0.09µm @ 80% capture rate
Repeatability is less than 1.0% at 1
of 0.204 diameter latex spheres on bare silicon
Contamination is less than 0.005 particles/cm² greater
than 0.15µm Illumination source is 30mW Argon-Ion laser
488 wavelength
Haze Sensitivity is 0.02ppm