KLA-Tencor AIT II

Set up for 6” or 8"
Dual open loader
Double Darkfield Inspection Tool Standard features Modular Inspection Station
75mW, 488nm Argon Ion Laser
High Resolution Flat Panel Display
Fully Integrated Review Microscope with AutoFocus Capability (10x, 50x, 100x, 150x objectives)
Two fully independent inspection channels
10um Single Incident Spot Optics
Additional 7um and 5um spot size
Low Contact Chuck
Integrated ULPA Filter - Class 0.1 (ISO Class 2 or better)
Network Communication
Windows NT 4.0 based Operating System
Handler Protective Cover
KLA rf Output