KLA-Tencor Alpha Step 500, Profilometer

Brand: KLA-Tencor
Model: Alpha Step 500
PROFILOMETER

Specifications
• Used
• Computer controlled Scanning and data collection
• Comprehensive data analysis software
• Intuitive user interface
• Application-specific recipes easily programmed
• Stylus-based surface profiler adjustable between 1 and 100mg
• High resolution VGA monitor
• Zoom optics with magnification up to 210x
• Multi-scan average mode scans up to 10 times and then averages the scan before print out
• Powerful Data Analysis w/ up to 30 standard surface parameters selections
• Accurate Surface Characteristic Measurement w/ resolution to 1A
• 2D step height metrology profiling with guaranteed 10Å (1s) or 0.1% repeatability
• Enables R&D and QA process control with step height metrology below 50 nm to 300 µm
• Environment Interference protection hood