KLA-Tencor P20H Long Scan Profiler

1x, KLA-Tencor P20H Long Scan Profiler

Long scan profiler measurement tool.

Features:
Ability to fit and level data, allowing accurate
measurements on curved surfaces
2-D and 3-D plots and contour maps
Table top unit
Specifications:
Long scan profiler measurement of vertical
features ranging from 100Å to 0.33mm
Measurement of vertical featers ranging from under 100
to approximately 0.33mm, with a vertical resolution of 1 or 25
Capable of handling wafers from 3" to 8" cassette to cassette
Scans up to 25 wafers without operator intervention