KLA-Tencor Surfscan SP1-DLS, Wafer Surface Analysis System

Brand: KLA-Tencor
Model: Surfscan SP1-DLS
WAFER SURFACE ANALYSIS SYSTEM

Specifications
• Used
• 0.050um Defect Sensitivity on polished bare silicon
• Enhanced Edge Exclusion
• Enhanced Rough Film Sensitivity
• Argon Ion Laser (488-nm)
• 4 Dark Field Collection Channels (Normal Wide,
Normal Narrow, Oblique Wide, Oblique Narrow)
• RTDC (Real Time Defect Classification)
• Map to Map
• Measurement Chamber with ULPA Filter and Blower Unit
• Operator Interface (integrated in Measurement Module)
• Microsoft Windows NT 4.0 Operating System
• Security, Logging & Native Networking as provided by Windows NT
• Interactive Pointing Device, Keypad Controls
• 18" TFT Flat Panel Display
• Parallel Printer Port
• Defect Map and Histogram with Zoom
• MicroView Measurement Capability
• Iomega 2GB Removable Jaz Drive