Nanometrics 8300XSE Film Thickness Analyzer

J.A. Woollam M-44 Spectroscopic Ellipsometer
J.A. Woollam EC-270 Ellipsometer Controller
J.A. Woollam LPS-420 Xenon Light Source
Manual Loading of up to 300mm Wafers
Yaskawa ERCR-NS01-B004 Motion Controller

Wafer Size Range
Minimum 200 mm
Maximum 300 mm
Set Size 300 mm
Illumination Source Type Multi-wavelength Source
Multi-Layer Film Capacity YES
Micro Spot Optics YES
Scanning Stage YES
Wafer Mapping YES
Controller Type PC Controller Type
Condition Excellent
Power Requirements 115 V 15.0 A 50/60 Hz 1 Phase