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Novellus INOVA XT
Ref :
2609705-9-CP
Condition :
Used
Manufacturer :
Novellus
Model :
INOVA XT
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Last check :
17 Apr. 2024
Configuration:
- MAG7 Brooks Robots
- MC3 Novellus Module controller
- Pfeiffer Turbo and turbo controller
- 3 CTI/Hilex/Brooks Cryo pump
- Brooks FOUP cassette wafer loader
- VAT throttle valve and controllers
- AE PDX 5000 RF Generator
- AE RFG 5500 RF Generator
- MKS RF Generator
- DC power supply
- Right Degas Chamber
- PVD chamber
- Preclean Chamber
- Left Degas Chamber
- Transfer Module with dual blade
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