Oxford ionfab 300plus
Ref :
2416094-9-AW
Condition :
Used
Manufacturer :
Oxford
Model :
ionfab 300plus
Year(s) :
1994
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
1994 Oxford Ionfab 300 Plus Ion Beam
etching/deposition system
SERIAL NUMBER 219574
THE TOOL HAD 4 MFCs, only used ARGON to mill metal layers on SILICON wafers
HAS 3cm gun,we did'nt sputter
It holds 4, 4" targets,
HAS 15cm Gun for etching
200 mm tooling
The motor controllers were upgraded
Comes With manual
only used t he ION milling portion of the tool
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