Plasmatherm 790 11 RIE

Process Reactive Ion Etch System
Controller Type PC Controller Type
High Vacuum Pump Leybold 361C
Roughing Pump Leybold D40BCS
RF Generator Model RFPP 5S, 500W
Automatch Text RFPP AM-5
Number of Gas Inputs Five Gas
Chillers
Number of Chillers 1
Chiller #1Manufacturer/Model Neslab HX 75, Air cooled
Accessories
Leybold ITR100 active ion gauge

Other Information
Refurishment to include:
Wet clean of gas shower and chamber
Servicing of throttle valve
Replacement of chamber viewing windows
Rebuilt Leybold 361C turbomolecular vacuum pump
Rebuilt Leybold D40BCS mechanical vacuum pump-Fomblin prepped. Oil not included.

NB: The Gas manifold will not be replaced.
Power Requirements 208 V 60 Hz 3 Phase