Prometrix

Prometrix FT-650

* Film Thickness Mapping System
* Measures single or multiple layers or oxide, nitride,
photoresist, polysilican and other optical transparent films.
* Measurement capabilities from 100 angstom to greater that
4 microns.
* Analysis capabilities: Mapping: Die, Contour, 3-D maps.
* Scanning: Diameter scan
* Sampling: Quick tests, user definable tests
* Cassette to cassette wafer handling
* Measurement capabilities:
* Measurement: Film thickness, reflexivity.
* Spot sizes: 4um to 80um
* Number of layers: Up to 3
* Standard wafer sizes: 3, 3.25" and 100, 125, 150, 200mm.
* Interface Serial# 9101F6
* Probe station serial # 9104F7
* Elevator Station # 911C4FT
* Olypmus objectives: MS PLan 2.5x, 5x, 10x, 20x and a ULWD
MS plan 50x
* Mfg in 1990