Solitec 820-CB

Ref : 2440805-9-AW

Condition : Used

Manufacturer : Solitec

Model : 820-CB

Year(s) : 1988

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 03 Feb. 2024

Features and Specifications:

Resist Uniformity: 75 angstroms, 3 sigma
Microprocessor Controlled (10 program capacity)
Fast Hot Plate Bake: +/- 1.5ºC uniformity
Speed Range: 200-8,000 rpm (solid state servo control)
Acceleration Range: programmable from 0-40 krpm/s
Hot Plate: up to 300ºC vacuum assisted enclosed bake
Beltless Elevators
Nitrogen Requirement: 1 connection, 1/4" OD, 60 psi
Vacuum Requirement: up to 4 connections, 1/4" OD

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