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Tegal 903E
Ref :
2419161-9-CP
Condition :
Used
Manufacturer :
Tegal
Model :
903E
Year(s) :
1985
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
12 Dec. 2023
-Set up for load and unload of 4 inch wafers, cassette to cassette.
-Sold Strictly "as is, where is", with condition as shown in the photos.
-Parts included:-
-RF Delivery Item CR1044-00406RW s/n 10511
-Matching Network Item CR1113-00301 s/n 14321
-Item CS1017-400xx s/n 10135 S22233232222W
Gas Box Setup:-
Gas N2 Range 2 SLM UPC1300
Gas: CF4 Range 100 sccm UFC1200A
Gas: N2 Range 20 SCCM UFC1000
Gas: C2F6 Range 50 sccm UFC1000