Balzers

Balzers Model SCS800 Source Isolated Fast Cycle E Beam Box Coater

Balzers SCS-800 includes 35 ½"" w x 35"d x 26" high water traced ss deposition chamber w/horizontal substrate rotary & full opening, hinged, "O" ring sealed door w/film shutter viewport. The source chamber is isolated from the deposition chamber by a large plate valve in order to facilitate short pump down times. The pumping system consists of a Balzers Model RCP501Z cryopump rated at 27500 l/s water vapor or 10,000 l/s air, complete w/Balzers Model UCC064 water cooled compressor, all hoses, cables, temperature indicator, electropneumatic valves/microprocessor controlled sequencer & Balzers DUO100-57 CFM- mechanical pump