ADE UltraGage 9500, Measurement System

Brand: ADE
Model: UltraGage 9500
MEASUREMENT SYSTEM

Specifications
• Used
• Thickness - centerpoint, five point, and full wafer scan.
• Shape - bow and warp using 3 point or best-fit reference
• Global flatness - SEMI, GBI, TIR, FPD, FPD%
• Site flatness - All semi M1 standards with 8-30 millimeter site size and variable offsets.
• Multifunction dimensional measurements for 500nm design rule.
• Supports 4" to 8" wafer diamter.
• Capable of measure 8,700 data points in less than 60 seconds
• 2-D contour map