Asyst Technologies VersaPort 2200

Model: VersaPort 2200


Used
Details:
The VersaPort 2200 is a 200mm class load port for presenting wafers on reticles to the process tool while maintaining better-than-Class 1 cleanroom environment for the substrate.


Specifications:
Port Size - 200mm
Height (BOLTS interface) - 1385mm (54.53 in.)
Width VersaPort = 370.84mm (14.60 in.)
BOLTS interface = 470mm (18.50 in.)
Depth VersaPort = 396.24mm (15.60 in.)
VersaPort on BOLTS interface = 415.3mm (16.35 in.)
Weight (without SMIF-Pod) ~56.70Kg (~125 lbs.)
Port Plate Height while operating (at Stage position) - 1188.5mm (46.79 in.)
Port Plate Height at Home position 900mm (35.43 in.)
Speed ~76.2mm (~3.0 in.) per second (constant velocity)
Mounting Direct mount to Process Tool using a SEMI E63 BOLTS interface frame
Power 24 vdc (+10%, -5%) from external source
1.5 Amps standby; 3.0 Amps typical during operation; 4.0 Amps maximum
Laser Diode laser; Wavelength =670nm
Laser Power