Branson C

Brand: Branson
Model: V
Dual quartz chambers
for 100-150mm wafers
cassette to cassette operation

Used
Details:
Features:
Automatic pick-and-place wafer handling
Automatic pneumatic soft-lift
assemblies for each chamber in-line gas filters
(0.05 micron)
T-o PM 732 automatic networks
Quartz halogen lamp for preheating
Process capability:
Positive and negative resist
hardened resist, polyimide
Process control and instrumention
Microprocessor controller, menu driven
Programmable process parameters: gas flow
chamber pressure, RF power, strip time, heat lamp on time
overstrip time
Programmable tolerance limits: RF power (forward and reflected)
time pressure, gas flow, pumpdown
Automatic pressure control
Programmable tolerance limit alarm
Dual quartz chambers for 100-150mm wafers (or 150-200mm wafers)
cassette to cassette operation