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Cymer NL 7600A, Laser ARF 193nm

Ref : 3436
Condition : Used
Manufacturer : Cymer
Model : NL 7600A, Laser ARF 193nm
Year(s) : 2001
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 11 Jul. 2016

Laser ARF 193nm
Manufacture: Cymer
Model#: NL 7600A

Configuration:
400V, 50/60Hz, 3-Phase
5-wire 70A / phase.

Electrical diagram 101422.
100W, 25mJ, 193nm, 5-35ns.