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Gasonics 7104, Plasma Etch System
Ref :
1168417-9-W
Condition :
Used
Manufacturer :
Gasonics
Model :
7104, Plasma Etch System
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
08 Aug. 2014
Brand: GaSonics
Model: 7104
PLASMA ETCH SYSTEM
Specifications
• Used
• Front and backside isotropic removal
• Downstream ashing for minimized device damage
• Pick and place wafer handling
• Precise endpoint detection
• Pressure control option
• SMIF compatible
• SECS II interface, multiple process step capability
• Variable lamp heating for temperature control
• Table top or floor/through the wall designs.
• Specifications:
• Small footprint: 80cm (32") width x 80cm (32") length x 70cm (28") height
• 75mm - 150mm wafer cpabaility
• Up to 2 MFC's