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Gasonics AE2001 Etch System
Ref :
1324055-9-W
Condition :
Used
Manufacturer :
Gasonics
Model :
AE2001 Etch System
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
Brand: GaSonics
Model: AE2001 Etch System
Used
Details:
Microwave downstream etcher
Features:
Cassette to cassette wafer handling
Front and backside etching
Variable platen temperature
Alumina (ceramic) plasma tube
Fluorine compatible chamber
SECS II interface
Multiple step process caability
Stand alone/ floor standing model