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Gasonics Aura 3010 Photoresist Asher
Ref :
1324070-9-W
Condition :
Used
Manufacturer :
Gasonics
Model :
Aura 3010 Photoresist Asher
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
Brand: GaSonics
Model: Aura 3010 Photoresist Asher
Used
Details:
A downstream photoresist removal system
A damage-free asher with closed loop temperature control. 5 - 8 inch (125mm-200mm) wafer capability.
5 - 8 inch (125mm-200mm) Wafer Capability.
Small footprint
High throughput
Fully automated downstream microwave asher.
optional SMIF by Asyst LPT-2200.
Lamp heating for slow or fast heat ramp.
Microwave, lamp, and endpoint detector monitors.
Computer controlled, multiple-step capability
SECS II Interface (optional)