KLA-Tencor 7700

1x, KLA-Tencor 7700 Wafer Surfscan Inspection System

A patterned and unpatterned wafer inspection
and can accommodate wafers between 4" to 8".

Features:
High sensitivity on after-ech
and high topography applications
Dual collection channels
Circular input polarization
Multi-scan
Multi-threshold capability
Auto-learn
Programmable spatial filer
High speed digital signal processing
Off-axis collection with programmable spatial filter
Variable collection aperature
Variable polarization
Specifications:
Can detect defects as small as 0.15µm
Works with wafers from 4" to 8"
Count repeatability error
1.5% at 1 standard deviation
Mean count 500, 0.5mm diameter latex spheres standard
30mW Argon-Ion laser
488nm wavelength variable input polarization