KLA-Tencor P-2 Long Scan Profilometer

1x, KLA-Tencor P-2 Long Scan Profilometer

High sensitivity, long scan surface profiler measuring roughness
waviness and step height. Refurbished by SPEC Equipment
to meet all OEM refurbishment requirements.

Specifications:
Ability to measure micro-roughness with 1 angstrom
over short distances as well as waviness over a full 210mm scan
Measure waviness over a full 8" scan
Measurement of vertical features ranging from under 100A
(0.4 micro inches) to close to 0.3mm (+ or - 11mils)
with a vertical resolution of 1 or 25 A
Ability to repeat a scan up to 10 times automatically calculate
the average
Scan Speed: 1 um/sec to 25mm/sec.
Vertical range: +/- 6.5um at 1A resolution & +/- 150um at 25A.
Vertical Linearity: 10A below 2000A, +/- .5% above 2000A.
Horizontal Resolution: 100A at 1 um/second scan speed
up to 5000 data points per scan depending
on scan speed and length
Horz. Resolution max. 1 data point every:
@1um/s scan speed = .01um (100A)
Max Sample Size: 254 x 254mm; 10"x10"
Stylus force: 1 - 100 mg @ .1mg resolution
Vertical Resolution (max.)
@1A = +/-6.5um; @25A = +/- 150um