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Lam Research 2300 Exelan

Ref : 2019351-9-FM
Condition : Used
Manufacturer : Lam Research
Model : 2300 Exelan
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 15 Aug. 2019

Oxide etcher, 12"
(2) BROOKS Load ports
Power control rack: AC Rack & P/C

Vacuum:
Airlock (Right & Left)
TM / PM Facility line

Process module 1 & 2:
Chamber type: 2300 Exelan
VAT Pendulum value
Chuck: ECS

Missing parts:
ATM Robot
Wafer alignment
Wafer alignment module
VTM Robot
Turbo pump (ATH 1600M)
Turbo controller
RF System A/C power
Generator (TCP)
Generator (BIAS)
(2) Exelan
EFEM
MagnaTran 7
Loader