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Lam Research Rainbow 4526 Oxide etcher

Ref : 1974557-9-FM
Condition : Used
Manufacturer : Lam Research
Model : Rainbow 4526 Oxide etcher
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Clamp
Gas standard: Ar, CF4, CHF3, O2, He, N2
Anisotropic chamber
Chambers type: Anodizes Al
Gap leads screw missing
RF Generators: 2200 W Standard
Power requirements: 208 Volts / Amps.