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Nanometrics Nanospec 4150

Ref : 1953158-9-MT
Condition : Used
Manufacturer : Nanometrics
Model : Nanospec 4150
Year(s) : 1998
Quantity : 1
Location : Seller or machines location:
ASIA (North East)
Last check : 31 May. 2019

Nanometrics Nanospec 4150 Film Thickness Measurement

Wafer Size 8"
Vintage 1998
Wafer Size : Up to 200mm
Computer Tower(Nano program version 3.3)
Spectrometer Head
Automatic Stage & Stage controller with twin chuck (4 ~ 8" wafer size)
PULNiX TMC-7 High Resolution CCD Color Camera
UV lamp housing & Deuterium Lamp Power Supply
Auto focus : Not available (Image capture board to be repaired)
Spot size : 3~60um
Objectives : MSPlan 5X / MSPlan 10X / MSPlan 50X, Reflecting Objective X15
Eyepiece : 10X

Wavelength : Visible 400~900nm , 200~900nm with UV (option)
Acuracy : Within ± 1% (Oxide Standard)
Precision : 2Å, 500~50,000Å Visible /1Å, 25~500Å UV option
Stability : 0.5% or 5Å or whichever is greater
Data analysis : Mapping contour 2D and 3D / Statistical Process Control (SPC)