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Others International industrial batch treatment and cleaning systems

Ref : 1322951-9-W
Condition : Used
Manufacturer : Others
Model : -
Short Description : International industrial batch treatment and cleaning systems
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 24 Apr. 2020

Brand: GaSonics
The 7100 Series is the most popular of the GaSonics International
industrial batch treatment and cleaning systems

Used
Details:
his full-featured system is based on proven reactor features
and system drivers developed over the past twenty years.

The GaSonics tool is a batch plasma system
Processing is accomplished at low temperature
and is used for surface treatment, descum
and cleaning organic material such as
photoresist from metal, silicon
and other assemblies


Features:
Front and backside isotropic removal
Downstream ashing for minimized device damage
Pick and place wafer handling
Precise endpoint detection
Pressure control option
SMIF compatible
SECS II interface, multiple process step capability
Variable lamp heating for temperature control
Table top or floor/through the wall designs.
Specifications:
Small footprint: 80cm (32")
width x 80cm (32") length x 70cm (28") height
75mm - 150mm wafer cpabaility
Up to 2 MFC's

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