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Oxford Instruments

Ref : 1892387-9-MT
Condition : Used
Manufacturer : Oxford Instruments
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 22 Mar. 2019

Oxford Instruments Plasmalab 80 Plus RIE

Plasma System. RF matching network mounted on top of chamber. ENI ACG-3 13.56 MHz 300W RF generator. 6-inch diameter platen. Does not include vacuum pump. 208V, 3 Ph, 50/60 Hz