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Plasmatherm 790 11" RIE
Ref :
2313726-9-AW
Condition :
Used
Manufacturer :
Plasmatherm
Model :
790 11" RIE
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
03 Feb. 2024
Wafer Size Range
Minimum 50 mm
Maximum 200 mm
Process Reactive Ion Etch System
Controller Type PC Controller Type
High Vacuum Pump Leybold 361C
RF Generator Model RFPP 5S
Number of Gas Inputs Four Gas
Process Gases SF6, O2,CF4,Ar
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