Rudolph Research Auto EL IV Ellipsometer

Brand: Rudolph Research
Model: Auto EL IV Ellipsometer
The AutoEl IV has automatic 3 wavelength operation and a scanning stage

Used
Details:
Multiple wavelength operation
gives this instrument more flexibility
for meauring multiple film stacks
The scanning stage allows wafer uniformity to be measured
The system automatically
calculates ellipsometric parameters, thickness, and index

Features:
Multi-Wavelength uses light at 3 different wavelengths
Tungsten Halogen Laser
ncludes Micro-spot
SECS II Interface
uilt In printer

Specifications:
Maximum wafer size: 150mm
Wavelength: 633, 576, 405 nm