AMERICA North (USA-Canada-Mexico)
Rudolph MetaPulse 300 Cu Thin Film Metrology
Rudolph MetaPulse 300 Cu Thin-Film measurement tool measures ultrathin at the 45nm technology node to thick opaque films,Picosecond laser sonar (PULSE tm) technology, On product meausrement are enabled with the small spot size and non-contact, noon-destructive measurement methode. Thickness measurements, RMS roughness, material density, adhesion, mataerial phase and interlayer reactions, low-k and ultra low-k ILD modulus capabilties. 200mm & 300mm automation.