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Solid State Measurements (SSM) 5130 HG-CV System for EPI resistivity measurement

Ref : 1959457-9
Condition : Used
Manufacturer : Solid State Measurements (SSM)
Model : 5130 HG-CV System for EPI resistivity measurement
Year(s) : -
Quantity : 1
Location : Seller or machines location:
Korea, South
Last check : 08 Feb. 2019

■ Capable up to 12" Wafer (4,6, 8" available)
■ Manual wafer load/unload and Auto stage
■ SSM 52 Capacitance Measurement Unit
■ Test station including kinematic probe arm and chuck
■ Motor control unit
■ Pneumatic control Unit
■ PC System
■ PROCAP software
■ Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%)