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SPTS LPX APS

Ref : 2179933-9-FM
Condition : Used
Manufacturer : SPTS
Model : LPX APS
Year(s) : 2014
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Max Wafer:
200mm
Configuration:
Single Chamber, Load-Locked, 200mm Capable
- Production proven single wafer process chamber (aluminium)
- Magnetic and Heated chamber
- Leybold Turbo Pump
- Heated VAT Pendulum Valve
- Backside Helium Cooling
- Extracted gas box with orbitally welded gas lines
- Electronics Rack
- LCD flat panel monitor
- MKS Capacitance Manometer (0.1 Torr)
- MKS Spectrum RF Generator (Source)
- MKS Spectrum RF Generator (Bias)

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