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SSI Solaris 150

Ref : 2068653-9
Condition : Used
Manufacturer : SSI
Model : Solaris 150
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 07 Jan. 2021

▪ Operating Temperature Range RT – 1300 Degrees Celsius
▪Gas Delivery system is capable of up to 6 Mass Flow controllers.
▪ Zone control temperature for enhanced process control and allows for top side or bottom side heating only as an option.
▪ Wafer Capability: 1″ to 6″ , Sample holders are available.
▪ Sic Coated Susceptors available for III-V processing.
▪ Quartz Liners Available for BPSG/PSG Processing

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