SSI Solaris 150
AMERICA North (USA-Canada-Mexico)
▪ Operating Temperature Range RT – 1300 Degrees Celsius
▪Gas Delivery system is capable of up to 6 Mass Flow controllers.
▪ Zone control temperature for enhanced process control and allows for top side or bottom side heating only as an option.
▪ Wafer Capability: 1″ to 6″ , Sample holders are available.
▪ Sic Coated Susceptors available for III-V processing.
▪ Quartz Liners Available for BPSG/PSG Processing