Watkins Johnson (WJ) 1000

Brand: Watkins Johnson
Model: (WJ) 1000
Efficient and productive APCVD system

Used
Details:
Capable of 100mm, 125mm
150mm, and 200mm wafer processing
Process extendibility
from 0.5 micron to 0.08 micron
Characterized process
models for Atmospheric Pressure processes
SMIF/AGV compatible
complying with SEMI specifications
Process muffle environment
designed for process flexibility
Four matched deposition chambers
are environmentally controlled
to provide continually repeatable film results
High dopant incorporation in bulk film for best planarization
High throughput due to high deposition rate in bulk film
Low cost of ownership