ALICONA INFINITEFOCUSXL200 G5

Positioning volume 200 × 200 × 200 mm
Maximum workpiece weight 30 kg
Lens magnifications 2.5x
Lens magnifications 5x
Lens magnifications 10xHX
Lens magnifications 10x
Lens magnifications 20xHX
Lens magnifications 20x
Lens magnifications 50x
Lens magnifications 100x
Numerical aperture 0.075–0.8
Working distance 4.5–37 mm
Lateral measuring range 5.63 mm to 0.16 mm
Vertical resolution 2300 nm to 10 nm
Measurement noise 800 nm to 1 nm
Vertical measuring range 8–36 mm
Measurement speed up to 1.7 million measurement points/s
Minimum measurable roughness Ra 7 µm to 0.03 µm
Minimum measurable roughness Sa 3.5 µm to 0.015 µm
Minimum measurable height 2.3 µm to 0.01 µm
Maximum measurable area up to 40,000 mm²
Accuracy and flatness 0.1 µm (10x lens)