KLA-Tencor RS35C, Resistivity

Brand: KLA Tencor
Model: RS35C Resistivity
Resistivity Mapping System
4 Point Prober with printer

Used
Details:
3-D mapping and contour
Trend charts
Capable 4" - 8" wafers
The OmniMap collects
and analyzes sheet resistance data
on various conductive layers such
as implants, diffusions, epi, CVD
metals and bulk substrates
Provides accurate and repeatable sheet resistance
Measurements from 5m ohms/sq to 5m ohms/sq on 2 in
(50mm) to 8 in. (200mm) wafers
by uniting sophisticated modeling algorithms
Advanced analysis techniques and precision electronics
Measures up to 1264 sites per wafer using standard or user-defined patterns, and displays test results in the form of contour maps
System refurbished to meet OEM Specification