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Others RTP-600xp

Ref : 1942186-9
Condition : Used
Manufacturer : Others
Model : RTP-600xp
Year(s) : 2004
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 30 Jun. 2020

Brand: Modular Process Tech
1x MPT (Modular Process Technology), RTP-600xp, Single Chamber, 2004

Description
- Serial Number 95294 Date of Mfg: Aug. 2004
- Windows NT Based Bench Top RTP Unit
- Integrated Pentium Processor & Flat Panel Display
- Applications Include Rapid Thermal Alloying, Annealing, Implant Activation, - Oxidation & Reflow
- Thermal Processing of Si, Ge, Si/Ge, GaAs, InP and Other Semiconductor Materials
- Capable of Processing 2"-6" Wafer Size
- 250-1300°C Temperature Range Rate
- 1-200°C/sec Temperature Ramp Rate
- Quartz Process Chamber, Capable of Handling Inert & Reactive Gases
- Dual Color Pyrometer with Auto-Calibration Feature
- Up to 6 Channels MFC Control

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