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Steag AST SHS2000
Ref :
2080004-9-W
Condition :
Used
Manufacturer :
Steag
Model :
AST SHS2000
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
Specifications:
Wafer size: 75 to 200mm
Process gases - Standard: NH3, N20, Ar, O2
Recommended temp. range: 400 deg. C to 1200 deg. C
Absolute temperature accuracy:
With thermocouple: +/- 2 deg. C
With pyrometer control: +/- 4 deg. C
Temperature duration:0 - 1000 sec per step
Heating rate: 1 - 400 deg. C / sec
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