Yamato Scientific PDC510 Plasma Dry Cleaner

[Main Specifications]
* Year of Manufacture: 2019
* Plasma Method: DP/RIE Switchable
* Electrode Structure: Parallel Plate Type
* Oscillation Frequency: 13.56MHz Crystal Oscillator
* High-Frequency Output: Max 500W
* Chamber Dimensions: W500 × D290 × H200mm
* Reaction Gas: O2, Ar
* Purge Gas: N2, Dry Air
* Stage Dimensions: W410 × D210mm
* Power Supply: 3φ AC200V 15A 50/60Hz
* External Dimensions: Approx. W700 × D700 × H1280mm (excluding protrusions)
* Weight: Approx. 180kg
* Accessories: : Air-cooled dry vacuum pump (Yamato Scientific PK600)

[Equipment Status]
Instruction manual included
The white platform cart on which the vacuum pump is mounted is not included.