Yield Engineering Systems (YES) 310TAE

- Chamber Dimensions: 12" x 12" x 13.25"
- Temperature Controller: Athena Controls
- PLC: Quickpanel Jr.
- Gauge: Granville-Phillips 375 Convectron
- Included: HMDS cylinder
- Included: Professionally rebuilt vacuum pump
- Power Requirement: 120V, 11A, 1300W, 50/60 Hz
- Documentation: Operating manuals and documentation included
- Condition: Excellent
- Refurbished to factory specifications
- Return Policy: 30-day right of return