Yield Engineering Systems (YES) YES-FPO, Dual Function (Vacuum bake/Vapor Prime - Image Reversal)

MANUFACTURE:
Yield Engineering
MODEL/TYPE#:
YES-FPO
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DESCRIPTION:
Dual Function (Vacuum bake/Vapor Prime - Image Reversal)

SPECIFICATIONS:
The FPO vacuum bake/vapor prime process,
you can significantly extend time available between process steps.
Plus, chemical usage for a vapor deposition process is
typically less than 1% of the amount needed for wet application processes,
significantly reducing waste and chemical costs.

Chamber Size: 26w" x 26h" x 20d"

HMDS Process
Batch dehydration-bake
Temperature 275c max
HMDS Flask Included

Image Reversal Process
Image reversal reverses the action of
positive resist so that negative images can be formed
Image reversal process 90 deg. C
115VAC 10.5 Amps 60HZ
Exhaust is house exhaust