ZEISS CrossBeam 350

Scanning electron microscope
With patented GEMINI electron optics for high-resolution analysis
and imaging.
Equipment:
Thermal Schottky emitter.
Resolution, analytics and depth-of-field mode.
Extended beam deflection up to 200 µm.
Patented in-lens detector for detection of SE1 electrons.
EsB detector. Chamber secondary electron detector.
VPSE detector.
Large sample chamber with 330 mm internal diameter and 270 mm height.
Pneumatic pendulum damping system with automatic level control.
Automatic, oil-free vacuum system with IGP and turbomolecular pump.
6-axis motorized, eucentric specimen stage.
Digital image storage with a maximum of 32 k x 24 k pixels.
2 color CCD cameras for internal chamber observation.
Integrated software functions: signal mixer. Autofocus. Autostigmator. Dynamic focus. Scan field rotation. Free image annotation. Measurement software.
Accessories:
9-position sample holder carousel.
24" TFT monitor.
Long PC table (1650 mm x 1000 mm).
Automatic 200 mm load lock.
Plasma cleaner XEI Evactron E50 for FE-SEM.
Zeiss gas inlet system. Chiller.
Various sample holders.