AG Associates 210M
Ref :
1651029-9-W
Condition :
Used
Manufacturer :
AG Associates
Model :
210M
Year(s) :
1984
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
30 Jun. 2020
1x AG Associates, 210M, Rapid Thermal Implant Monitor, 1984
Description
- Ion Implant Activation, Polysilicon Annealing, Silicide Formation, Oxide Reflow (PSG & - BPSG), Alloying and Metallization
- Single Wafer Process
- Accommodates Wafer Sizes Through 4”
- 400 - 1200ºC Operating Temperature Range
- High-Intensity, Radiant Heating
- 1-100 Seconds Processing Cycle
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