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AG Associates 210M

Ref : 1651029-9-W
Condition : Used
Manufacturer : AG Associates
Model : 210M
Year(s) : 1984
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 30 Jun. 2020

1x AG Associates, 210M, Rapid Thermal Implant Monitor, 1984

Description
- Ion Implant Activation, Polysilicon Annealing, Silicide Formation, Oxide Reflow (PSG & - BPSG), Alloying and Metallization
- Single Wafer Process
- Accommodates Wafer Sizes Through 4”
- 400 - 1200ºC Operating Temperature Range
- High-Intensity, Radiant Heating
- 1-100 Seconds Processing Cycle

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