Bio-Rad QS-500 Automated FT-IR Film Thickness Spectrometer

Bio-Rad QS-500 automated FT-IR spectrometer for
non-destructive transmissive and
reflective thin-film measurement -
epitaxial silicon thickness, carbon & oxygen in
silicon (C & O in Si), and BPSG analysis, with KBr optical components.
- Handles 100 mm to 200 mm wafers (200 mm set size)
- Cassette-to-cassette with scanning stage and full wafer mapping
- Genmark robot and controller for automatic wafer handling
- Bio-Rad SPC 3200 data station (upgradable to a Windows XP PC)
- Bio-Rad 013-4100 spectrometer controller, stage controller, robot interface
- Excellent condition