CHA SE-600

Ref : 2734327-9-W

Condition : Used

Manufacturer : CHA

Model : SE-600

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

• Process: PVD physical vapor deposition
• Bell jar diameter: 19 in., water cooled
• Fixturing: Triple dome planetary, configured for 3 in. diameter wafers
• Monitor: Inficon IC6000 crystal deposition rate monitor
• Valve control: Automatic valve sequencer
• E-gun: Four pocket, manual rotation control
• Pocket sequencer: Manual only (no auto sequencer)
• Power supply: Temescal CV-8 E-Beam with controls
• Pump: Varian VHS-6 diffusion pump for high vacuum

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