CHA SE-600
Ref :
2734327-9-A
Condition :
Used
Manufacturer :
CHA
Model :
SE-600
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
• Process: PVD physical vapor deposition
• Bell jar diameter: 19 in., water cooled
• Fixturing: Triple dome planetary, configured for 3 in. diameter wafers
• Monitor: Inficon IC6000 crystal deposition rate monitor
• Valve control: Automatic valve sequencer
• E-gun: Four pocket, manual rotation control
• Pocket sequencer: Manual only (no auto sequencer)
• Power supply: Temescal CV-8 E-Beam with controls
• Pump: Varian VHS-6 diffusion pump for high vacuum
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