Disco DFD-2S/8

Fully Automatic Dicing Saw
Status: excellent
Application: Dicing/Cutting/Slotting various wafers

X - axis Section
Drive Method: AC Servo Motor
Stroke: 650mm Max
Effective Cut Stroke: 220mm
Cut Speed: 0.7~3000mm/sec

Y - axis Section
Drive Method: Pulse Motor
Max Programmable Stroke: 220mm
Index Speed: 30mm/sec
Indexing Method Min Index StepLinear Scale Closed Loop System 0.001mm
Indexing Accuracy: Single Pitch 0.003mm
Cumulative Pitch 0.005mm/200mm

Z - axis Section
Drive Method: Pulse Motor
Indexing Method: Rotary Encorder
Max Stroke: 25mm
Min Index: 0.002mm

Θ - axis Section
Drive Method: AC Servo Motor
Rotation Angle (end to end): 150 ˚ max
Indexing Time: 2sec/90˚
Min Index Angle: 1.62"

Spindle Section (High Frequency Air Spindle)
Output: 800W
RPM: 3,000 ~ 60,000

Spinner Section
Drive Method: AC Direct Drive
RPM: 3,000rpm MAX
Wash/dry Time: 999 Seconds Max
Wash → Rinse → Dry: Programmable
Accuracy of Table Positioning During Rotation: ± 1 ˚

Alignment Section
Alignment Method: CCD Camera Pattern Matching System
Microscope: Single Object Magnification (a b Selectable):
Macro Micro
a 2.66 X 7.5 X
b 7.08 X 19.88 X

With Auto Focus Mechanism

Handling Section
Loading/Unloading Section: Cross-Flow Arm System

Number of Cassettes Used (Detting for pitch and Number of Workpieces Can Be Changed): Number of Cassettes 1 for Each Loader/Unloader
8"Φ=1/4" , 26 Slots
3~6" Φ = 3/16" , 25 Slots

Utilities
power Supply
(1) AC 200/220 V: 3 Phase 50/60 Hz (domestic) 5 KVA
(2) AC 200 ~ 415V: *3 Phase 50/60 Hz (Overseas) 5 KVA Transformer Necessary

Water Pressure
Cooling Water (tap Water): 2Kg/㎠ 1.5 Liters/Min
Cutting Water (D.I Water): 3 kg/㎠ 5 Liters/Min
Air Pressure: 5.5kgf/㎠ ㆍG 440 Liters/Min
N: 5.5kgf/㎠ ㆍG - AT Max. use 565 liters/min